ADL technology

Product introduction

ALD coating technology： thin films are continuously grown from atomic layers

• The most advanced thin film coating technology available today
• Precise control of film thickness and structure down to the nanoscale
• Ultra-high uniformity and conformality of thin films on the finest nanostructures
• Tight, pinhole-free, defect-free films
• Good repeatability
• Low process temperatures allow deposition on temperature sensitive substrates

ALD is the key technology of modern integrated circuit industry ! !